WebSep 10, 2024 · Intrinsic ferroelectricity in Y-doped HfO2 thin films. Ferroelectric HfO2-based materials hold great potential for widespread integration of ferroelectricity into … WebHere we report the discovery of a field-driven ferroelectric phase transition in pure, sub 10 nm ZrO 2 thin films and a composition- and temperature-dependent transition to a stable ferroelectric phase in the HfO 2 –ZrO 2 mixed oxide.
Causes of ferroelectricity in HfO2-based thin films: an ab initio ...
WebThe ferroelectricity in doped HfO 2 was first reported in 2011, and has been intensively studied because then. Atomic layer deposition (ALD) has been the most frequently … WebJan 1, 2024 · The ferroelectricity in doped HfO 2 was first reported in 2011, and has been intensively studied because then. Atomic layer deposition (ALD) has been the most frequently utilized deposition technique for ferroelectric doped HfO 2 thin films, and the matured ALD techniques and subsequent easy doping are important advantages of … process selling on ebay
Ferroelectricity in Gd-Doped HfO2 Thin Films Semantic …
WebCorresponding plasma;34 Al(CH3 )3 , Hf[N(CH3 )(C2 H5 )]4 and O2 plasma;5 Al(CH3 )3 , behavior in HfO2 films doped with Al has been reported earlier.23,24 HfCl4 and H2 O.6,15 At least one of the metal precursors in those ex- Stabilization of metastable (incl. orthorhombic) HfO2 films grown by periments were aluminum alkyl or hafnium … WebMar 18, 2015 · The recent progress in ferroelectricity and antiferroelectricity in HfO2-based thin films is reported. Most ferroelectric thin film research focuses on … WebMay 3, 2016 · Since the discovery of ferroelectricity in Si:HfO 2 thin films in 2011, HfO 2 -based materials have aroused widespread interest in the field of FeRAM, because they are CMOS-compatible and can exhibit robust ferroelectricity even when the film thickness is scaled down to below 10 nm. process sensors pyrometer